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Robustness of RF MEMS Capacitive Switches With Molybdenum Membranes

Research output: Contribution to journal › Article › peer-review

Standard Standard

Robustness of RF MEMS Capacitive Switches With Molybdenum Membranes. / Palego, Cristiano; Deng, Jie; Peng, Zhen et al.
In: IEEE Transactions on Microwave Theory and Techniques, Vol. 57, No. 12, 10.11.2009, p. 3262-3269.

Research output: Contribution to journal › Article › peer-review

HarvardHarvard

Palego, C, Deng, J, Peng, Z, Halder, S, Hwang, JCM, Forehand, DI, Scarbrough, D, Goldsmith, CL, Johnston, I, Sampath, SK & Datta, A 2009, 'Robustness of RF MEMS Capacitive Switches With Molybdenum Membranes', IEEE Transactions on Microwave Theory and Techniques, vol. 57, no. 12, pp. 3262-3269. https://doi.org/10.1109/TMTT.2009.2033885

APA

Palego, C., Deng, J., Peng, Z., Halder, S., Hwang, J. C. M., Forehand, D. I., Scarbrough, D., Goldsmith, C. L., Johnston, I., Sampath, S. K., & Datta, A. (2009). Robustness of RF MEMS Capacitive Switches With Molybdenum Membranes. IEEE Transactions on Microwave Theory and Techniques, 57(12), 3262-3269. https://doi.org/10.1109/TMTT.2009.2033885

CBE

Palego C, Deng J, Peng Z, Halder S, Hwang JCM, Forehand DI, Scarbrough D, Goldsmith CL, Johnston I, Sampath SK, et al. 2009. Robustness of RF MEMS Capacitive Switches With Molybdenum Membranes. IEEE Transactions on Microwave Theory and Techniques. 57(12):3262-3269. https://doi.org/10.1109/TMTT.2009.2033885

MLA

Palego, Cristiano et al. "Robustness of RF MEMS Capacitive Switches With Molybdenum Membranes". IEEE Transactions on Microwave Theory and Techniques. 2009, 57(12). 3262-3269. https://doi.org/10.1109/TMTT.2009.2033885

VancouverVancouver

Palego C, Deng J, Peng Z, Halder S, Hwang JCM, Forehand DI et al. Robustness of RF MEMS Capacitive Switches With Molybdenum Membranes. IEEE Transactions on Microwave Theory and Techniques. 2009 Nov 10;57(12):3262-3269. doi: 10.1109/TMTT.2009.2033885

Author

Palego, Cristiano ; Deng, Jie ; Peng, Zhen et al. / Robustness of RF MEMS Capacitive Switches With Molybdenum Membranes. In: IEEE Transactions on Microwave Theory and Techniques. 2009 ; Vol. 57, No. 12. pp. 3262-3269.

RIS

TY - JOUR

T1 - Robustness of RF MEMS Capacitive Switches With Molybdenum Membranes

AU - Palego, Cristiano

AU - Deng, Jie

AU - Peng, Zhen

AU - Halder, Subrata

AU - Hwang, James C. M.

AU - Forehand, David I.

AU - Scarbrough, Derek

AU - Goldsmith, Charles L.

AU - Johnston, Ian

AU - Sampath, Suresh K.

AU - Datta, Arindom

PY - 2009/11/10

Y1 - 2009/11/10

U2 - 10.1109/TMTT.2009.2033885

DO - 10.1109/TMTT.2009.2033885

M3 - Article

VL - 57

SP - 3262

EP - 3269

JO - IEEE Transactions on Microwave Theory and Techniques

JF - IEEE Transactions on Microwave Theory and Techniques

SN - 0018-9480

IS - 12

ER -