Superlensing Plano-Convex-Microsphere(PCM) lens for direct laser nano marking and beyond

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A high-performance all-dielectric lens, formed by integrating a conventional plano-convex lens with a high-index
microsphere lens (PCM), was developed for far-field
super-resolution applications. The PCM lens features a
theoretical resolution of ∼ λ/2.5 in air with a WD ∼ 2 µm
away from the lens. When combined with a femtosecond
laser, the actual patterning resolution can reach ∼ λ/3.5.
The unusual focusing properties were theoretically and
experimentally verified, and direct laser nano-writing of
arbitrary patterns and nanostructures on various substrates
was demonstrated. This Letter can be naturally extended
to other super-resolution applications, including imaging,
sensing, and trapping, with the potential of developing nextgeneration low-cost direct laser nano-m
Original languageEnglish
Pages (from-to)1168-1171
JournalOptics Letters
Volume45
Issue number5
Early online date21 Feb 2020
DOIs
Publication statusPublished - 1 Mar 2020

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