Electronic versions

  • E. Campo
  • M.J. Lopez-Martinez
  • E.M. Campo
  • D. Caballero
  • E. Fernandez
  • A. Errachid
  • J. Esteve
  • J.A. Plaza
Original languageEnglish
Pages (from-to)1-10
JournalJournal of Micromechanics and Microengineering
Volume19
Issue number10
DOIs
Publication statusPublished - 17 Sept 2009
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