Versatile micropipette technology based on deep reactive ion etching and anodic bonding for biological applications
Research output: Contribution to journal › Article › peer-review
Standard Standard
Versatile micropipette technology based on deep reactive ion etching and anodic bonding for biological applications. / Campo, E.; Lopez-Martinez, M.J.; Campo, E.M. et al.
In: Journal of Micromechanics and Microengineering, Vol. 19, No. 10, 17.09.2009, p. 1-10.
In: Journal of Micromechanics and Microengineering, Vol. 19, No. 10, 17.09.2009, p. 1-10.
Research output: Contribution to journal › Article › peer-review
HarvardHarvard
Campo, E, Lopez-Martinez, MJ, Campo, EM, Caballero, D, Fernandez, E, Errachid, A, Esteve, J & Plaza, JA 2009, 'Versatile micropipette technology based on deep reactive ion etching and anodic bonding for biological applications', Journal of Micromechanics and Microengineering, vol. 19, no. 10, pp. 1-10. https://doi.org/10.1088/0960-1317/19/10/105013
APA
Campo, E., Lopez-Martinez, M. J., Campo, E. M., Caballero, D., Fernandez, E., Errachid, A., Esteve, J., & Plaza, J. A. (2009). Versatile micropipette technology based on deep reactive ion etching and anodic bonding for biological applications. Journal of Micromechanics and Microengineering, 19(10), 1-10. https://doi.org/10.1088/0960-1317/19/10/105013
CBE
Campo E, Lopez-Martinez MJ, Campo EM, Caballero D, Fernandez E, Errachid A, Esteve J, Plaza JA. 2009. Versatile micropipette technology based on deep reactive ion etching and anodic bonding for biological applications. Journal of Micromechanics and Microengineering. 19(10):1-10. https://doi.org/10.1088/0960-1317/19/10/105013
MLA
Campo, E. et al. "Versatile micropipette technology based on deep reactive ion etching and anodic bonding for biological applications". Journal of Micromechanics and Microengineering. 2009, 19(10). 1-10. https://doi.org/10.1088/0960-1317/19/10/105013
VancouverVancouver
Campo E, Lopez-Martinez MJ, Campo EM, Caballero D, Fernandez E, Errachid A et al. Versatile micropipette technology based on deep reactive ion etching and anodic bonding for biological applications. Journal of Micromechanics and Microengineering. 2009 Sept 17;19(10):1-10. doi: 10.1088/0960-1317/19/10/105013
Author
RIS
TY - JOUR
T1 - Versatile micropipette technology based on deep reactive ion etching and anodic bonding for biological applications
AU - Campo, E.
AU - Lopez-Martinez, M.J.
AU - Campo, E.M.
AU - Caballero, D.
AU - Fernandez, E.
AU - Errachid, A.
AU - Esteve, J.
AU - Plaza, J.A.
PY - 2009/9/17
Y1 - 2009/9/17
U2 - 10.1088/0960-1317/19/10/105013
DO - 10.1088/0960-1317/19/10/105013
M3 - Article
VL - 19
SP - 1
EP - 10
JO - Journal of Micromechanics and Microengineering
JF - Journal of Micromechanics and Microengineering
SN - 0960-1317
IS - 10
ER -