Porth Ymchwil

Charging characteristics of ultra-nano-crystalline diamond in RF MEMS capacitive switches

Allbwn ymchwil: Cyfraniad at gynhadledd › Papur

Fersiynau electronig

Dangosydd eitem ddigidol (DOI)

  • C. Goldsmith
  • A. Sumant
  • O. Auciello
  • J.A. Carlisle
  • H. Zeng
  • J. Hwang
  • C. Palego
  • W. Wang
  • R. Carpick
  • V.P. Adiga
  • A. Datta
  • C. Gudeman
  • S. O'Brien
  • S. Sampath
Modifications to a standard capacitive MEMS switch process have been made to allow the incorporation of ultra-nano-crystalline diamond as the switch dielectric. The impact on electromechanical performance is minimal. However, these devices exhibit uniquely different charging characteristics, with charging and discharging time constants 5-6 orders of magnitude quicker than conventional materials. This operation opens the possibility of devices which have no adverse effects of dielectric charging and can be operated near-continuously in the actuated state without significant degradation in reliability.
Iaith wreiddiolSaesneg
Tudalennau1246-1249
Dynodwyr Gwrthrych Digidol (DOIs)
StatwsCyhoeddwyd - 23 Mai 2010
DigwyddiadMicrowave Symposium Digest (MTT), 2010 IEEE MTT-S International, Anaheim, USA, 23-28 May 2010 -
Hyd: 3 Ion 0001 → …

Cynhadledd

CynhadleddMicrowave Symposium Digest (MTT), 2010 IEEE MTT-S International, Anaheim, USA, 23-28 May 2010
Cyfnod3/01/01 → …
Gweld graff cysylltiadau