Charging characteristics of ultra-nano-crystalline diamond in RF MEMS capacitive switches
Research output: Contribution to conference › Paper
Electronic versions
DOI
Modifications to a standard capacitive MEMS switch process have been made to allow the incorporation of ultra-nano-crystalline diamond as the switch dielectric. The impact on electromechanical performance is minimal. However, these devices exhibit uniquely different charging characteristics, with charging and discharging time constants 5-6 orders of magnitude quicker than conventional materials. This operation opens the possibility of devices which have no adverse effects of dielectric charging and can be operated near-continuously in the actuated state without significant degradation in reliability.
| Original language | English |
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| Pages | 1246-1249 |
| DOIs | |
| Publication status | Published - 23 May 2010 |
| Event | Microwave Symposium Digest (MTT), 2010 IEEE MTT-S International, Anaheim, USA, 23-28 May 2010 - Duration: 3 Jan 0001 → … |
Conference
| Conference | Microwave Symposium Digest (MTT), 2010 IEEE MTT-S International, Anaheim, USA, 23-28 May 2010 |
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| Period | 3/01/01 → … |