Three-dimensional excimer laser micromachining using greyscale masks

Allbwn ymchwil: Cyfraniad at gyfnodolynErthygladolygiad gan gymheiriaid

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Three-dimensional excimer laser micromachining using greyscale masks. / Hayden, Christopher.
Yn: Journal of Micromechanics and Microengineering, Cyfrol 13, 599, 2003.

Allbwn ymchwil: Cyfraniad at gyfnodolynErthygladolygiad gan gymheiriaid

HarvardHarvard

Hayden, C 2003, 'Three-dimensional excimer laser micromachining using greyscale masks', Journal of Micromechanics and Microengineering, cyfrol. 13, 599. https://doi.org/10.1088/0960-1317/13/5/310

APA

Hayden, C. (2003). Three-dimensional excimer laser micromachining using greyscale masks. Journal of Micromechanics and Microengineering, 13, Erthygl 599. https://doi.org/10.1088/0960-1317/13/5/310

CBE

Hayden C. 2003. Three-dimensional excimer laser micromachining using greyscale masks. Journal of Micromechanics and Microengineering. 13:Article 599. https://doi.org/10.1088/0960-1317/13/5/310

MLA

Hayden, Christopher. "Three-dimensional excimer laser micromachining using greyscale masks". Journal of Micromechanics and Microengineering. 2003. 13. https://doi.org/10.1088/0960-1317/13/5/310

VancouverVancouver

Hayden C. Three-dimensional excimer laser micromachining using greyscale masks. Journal of Micromechanics and Microengineering. 2003;13:599. doi: 10.1088/0960-1317/13/5/310

Author

Hayden, Christopher. / Three-dimensional excimer laser micromachining using greyscale masks. Yn: Journal of Micromechanics and Microengineering. 2003 ; Cyfrol 13.

RIS

TY - JOUR

T1 - Three-dimensional excimer laser micromachining using greyscale masks

AU - Hayden, Christopher

PY - 2003

Y1 - 2003

U2 - 10.1088/0960-1317/13/5/310

DO - 10.1088/0960-1317/13/5/310

M3 - Article

VL - 13

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

SN - 0960-1317

M1 - 599

ER -