Three-dimensional excimer laser micromachining using greyscale masks
Research output: Contribution to journal › Article › peer-review
Standard Standard
Three-dimensional excimer laser micromachining using greyscale masks. / Hayden, Christopher.
In: Journal of Micromechanics and Microengineering, Vol. 13, 599, 2003.
In: Journal of Micromechanics and Microengineering, Vol. 13, 599, 2003.
Research output: Contribution to journal › Article › peer-review
HarvardHarvard
Hayden, C 2003, 'Three-dimensional excimer laser micromachining using greyscale masks', Journal of Micromechanics and Microengineering, vol. 13, 599. https://doi.org/10.1088/0960-1317/13/5/310
APA
Hayden, C. (2003). Three-dimensional excimer laser micromachining using greyscale masks. Journal of Micromechanics and Microengineering, 13, Article 599. https://doi.org/10.1088/0960-1317/13/5/310
CBE
Hayden C. 2003. Three-dimensional excimer laser micromachining using greyscale masks. Journal of Micromechanics and Microengineering. 13:Article 599. https://doi.org/10.1088/0960-1317/13/5/310
MLA
Hayden, Christopher. "Three-dimensional excimer laser micromachining using greyscale masks". Journal of Micromechanics and Microengineering. 2003. 13. https://doi.org/10.1088/0960-1317/13/5/310
VancouverVancouver
Hayden C. Three-dimensional excimer laser micromachining using greyscale masks. Journal of Micromechanics and Microengineering. 2003;13:599. doi: 10.1088/0960-1317/13/5/310
Author
RIS
TY - JOUR
T1 - Three-dimensional excimer laser micromachining using greyscale masks
AU - Hayden, Christopher
PY - 2003
Y1 - 2003
U2 - 10.1088/0960-1317/13/5/310
DO - 10.1088/0960-1317/13/5/310
M3 - Article
VL - 13
JO - Journal of Micromechanics and Microengineering
JF - Journal of Micromechanics and Microengineering
SN - 0960-1317
M1 - 599
ER -