Overcoming material challenges for replication of "motheye lenses" using step and flash imprint lithography for optoelectronic applications.
Research output: Contribution to journal › Article › peer-review
Electronic versions
DOI
| Original language | English |
|---|---|
| Pages (from-to) | 1794-1799 |
| Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
| Volume | 26 |
| Issue number | 5 |
| DOIs | |
| Publication status | Published - 1 Sept 2008 |