Three-dimensional excimer laser micromachining using greyscale masks
Research output: Contribution to journal › Article › peer-review
Electronic versions
DOI
| Original language | English |
|---|---|
| Article number | 599 |
| Journal | Journal of Micromechanics and Microengineering |
| Volume | 13 |
| DOIs | |
| Publication status | Published - 2003 |