1. Article › Research › Peer-reviewed
2. Published

   Isotropic silicon etch characteristics in a purely inductively coupled SF6 plasma

   Panduranga, P., Abdou, A., Pedersen, R. H., Ren, Z. & Nezhad, M., 30 Nov 2019, In: Journal of Vacuum Science and Technology B. 37, 6, 061206.

   Research output: Contribution to journal › Article › peer-review

3. Conference contribution › Research › Peer-reviewed
4. Published

   Hybrid Diamond/Silicon Suspended Integrated Photonic Platform using SF6 Isotropic Etching

   Abdou, A., Richter, J., Thomas, E. L. H., Mandal, S., Ren, Z., Pedersen, R. H., Williams, O. A., Witzens, J., Nezhad, M. P. & Panduranga, P., 9 Apr 2020, 2019 IEEE 2nd British and Irish Conference on Optics and Photonics (BICOP). London: IEEE

   Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review